In August 2022, the company delivered a scattering-type terahertz time-domain spectroscopy system (TDS-s-SNOM) at the Shenzhen campus of Harbin Institute of Technology. In near-field terahertz imaging mode, the instrument achieves a spatial resolution of 80 nm. Laboratory near-field system testing was conducted in a non-sealed environment without dry-air purging, at an ambient temperature of 26 °C and 60% humidity. Atomic force probe: coarse positioning range: X ≥ 50 mm, Y ≥ 10 mm, Z ≥ 5 mm; coarse positioning accuracy: better than 200 nm; positioning accuracy: less than 200 nm; scanning range: 91 µm × 91 µm; X,Y closed-loop scanning area with Z-direction scanning range greater than 2 µm; scanning accuracy X,Y = 0.5 nm (closed loop), Z = 0.2 nm. An open optical path is adopted, and the atomic force probe offers an ultra-high optical access of up to 180 degrees horizontally and 60 degrees vertically. The maximum single near-field imaging measurement size is 40 × 50 × 15 mm (X,Y,Z).
Test results:
The figure below shows different orders and signal-to-noise ratios on a gold surface:
CD test results — the figures below show the AFM image, terahertz first-order signal amplitude, terahertz second-order signal amplitude, terahertz third-order signal amplitude, and terahertz second-order signal phase:
